Fabrication process of flexibly patterned grating by interference lithography system with automated beam alignment module

MLA

Liddle, J.Alexander, et al. “Fabrication Process of Flexibly Patterned Grating by Interference Lithography System with Automated Beam Alignment Module.” Proceedings of SPIE, vol. 12956, no. 1, Apr. 2024, p. 129560Q–129560Q–4. EBSCOhost, https://doi.org/10.1117/12.3010691.

APA

Liddle, J. A., Ruiz, R., Toyoda, K., Nawaki, Y., Yanoshita, R., Orihara, S., Wasamoto, M., Ota, K., & Tsuruoka, K. (2024). Fabrication process of flexibly patterned grating by interference lithography system with automated beam alignment module. Proceedings of SPIE, 12956(1), 129560Q–129560Q–4. https://doi.org/10.1117/12.3010691

Chicago

Liddle, J. Alexander, Ricardo Ruiz, K. Toyoda, Y. Nawaki, R. Yanoshita, S. Orihara, M. Wasamoto, K. Ota, and K. Tsuruoka. 2024. “Fabrication Process of Flexibly Patterned Grating by Interference Lithography System with Automated Beam Alignment Module.” Proceedings of SPIE 12956 (1): 129560Q–129560Q–4. doi:10.1117/12.3010691.