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Advancements in high-speed surface micro/nanostructuring using multi-beam processing approaches

Authors :
Phipps, Claude R.
Gruzdev, Vitaly E.
Hauschwitz, P.
Source :
Proceedings of SPIE; April 2024, Vol. 12939 Issue: 1 p129390S-129390S-7, 1164518p
Publication Year :
2024

Details

Language :
English
ISSN :
0277786X
Volume :
12939
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs66202244
Full Text :
https://doi.org/10.1117/12.2691084