Lithography performance improvement of MOR by underlayers

MLA

Guerrero, Douglas, et al. “Lithography Performance Improvement of MOR by Underlayers.” Proceedings of SPIE, vol. 12957, no. 1, Apr. 2024, pp. 1295715-1295715–13. EBSCOhost, https://doi.org/10.1117/12.3010887.

APA

Guerrero, D., Amblard, G. R., Li, S., Lu, X., Grannemann, S., Sweat, D., Brakensiek, K., Lu, P., Lowes, J., Krishnamurthy, V., Van Driessche, V., & Guerrero, D. J. (2024). Lithography performance improvement of MOR by underlayers. Proceedings of SPIE, 12957(1), 1295715-1295715–13. https://doi.org/10.1117/12.3010887

Chicago

Guerrero, Douglas, Gilles R. Amblard, Si Li, Xinlin Lu, Stephen Grannemann, Daniel Sweat, Kelsey Brakensiek, et al. 2024. “Lithography Performance Improvement of MOR by Underlayers.” Proceedings of SPIE 12957 (1): 1295715-1295715–13. doi:10.1117/12.3010887.