Superlattice effects and limitations of non-destructive measurement of advanced Si/Si1-xGexsuperlattice structures using Mueller matrix scatterometry (MMSE) and high-resolution x-ray diffraction (XRD)

Details

Language :

English

ISSN :

0277786X

Volume :

12955

Issue :

1

Database :

Supplemental Index

Journal :

Proceedings of SPIE

Publication Type :

Periodical

Accession number :

ejs66214879

Full Text :

https://doi.org/10.1117/12.3010523