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Axicon-lens-doublet focusing for the fabrication of ultra-high-aspect-ratio structures through silicon with infrared ultrafast lasers
- Source :
- Proceedings of SPIE; June 2024, Vol. 13005 Issue: 1 p130050L-130050L-7, 1170458p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 13005
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs66893494
- Full Text :
- https://doi.org/10.1117/12.3017566