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High groove density diffraction grating replication based on UV composite rolling technology
- Source :
- Proceedings of SPIE; September 2024, Vol. 13254 Issue: 1 p132540Z-132540Z-6, 1192867p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 13254
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs67382509
- Full Text :
- https://doi.org/10.1117/12.3040443