Back to Search Start Over

Gate gap detection method based on double checkerboard calibration

Authors :
Zhao, Ji
Yang, Yonghui
Yang, Quanlin
Huang, Xiaoliang
Ren, Dexing
Zhu, Xiaolong
Source :
Proceedings of SPIE; September 2024, Vol. 13256 Issue: 1 p1325625-1325625-7
Publication Year :
2024

Details

Language :
English
ISSN :
0277786X
Volume :
13256
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs67382657
Full Text :
https://doi.org/10.1117/12.3037992