Analyzing the vibration and mechanical properties of the MEMS membrane with planar spring arms design for energy harvesting

Details

Language :

English

ISSN :

0094243X and 15517616

Volume :

3115

Issue :

1

Database :

Supplemental Index

Journal :

AIP Conference Proceedings Online

Publication Type :

Periodical

Accession number :

ejs67459168

Full Text :

https://doi.org/10.1063/5.0207450