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Heterogeneous integration of active photonic materials leveraging substrate-inverted multimaterial integration technology (SuMMIT)
- Source :
- Proceedings of SPIE; October 2024, Vol. 13110 Issue: 1 p131100A-131100A-9, 1179910p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 13110
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs67664862
- Full Text :
- https://doi.org/10.1117/12.3025748