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Corrigendum: “Low-thermal-budget crystallization of ferroelectric Al:HfO2films by millisecond flash lamp annealing” [Jpn. J. Appl. Phys. 6309SP10 (2024)]

Authors :
Tanimura, Hideaki
Ueno, Yuma
Mifune, Tomoya
Fujisawa, Hironori
Nakashima, Seiji
Osaka, Ai I.
Kato, Shinichi
Mikawa, Takumi
Source :
Japanese Journal of Applied Physics; October 2024, Vol. 63 Issue: 10 p109302-109302, 1p
Publication Year :
2024

Details

Language :
English
ISSN :
00214922 and 13474065
Volume :
63
Issue :
10
Database :
Supplemental Index
Journal :
Japanese Journal of Applied Physics
Publication Type :
Periodical
Accession number :
ejs67840538
Full Text :
https://doi.org/10.35848/1347-4065/ad879f