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Corrigendum: “Low-thermal-budget crystallization of ferroelectric Al:HfO2films by millisecond flash lamp annealing” [Jpn. J. Appl. Phys. 6309SP10 (2024)]
- Source :
- Japanese Journal of Applied Physics; October 2024, Vol. 63 Issue: 10 p109302-109302, 1p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 00214922 and 13474065
- Volume :
- 63
- Issue :
- 10
- Database :
- Supplemental Index
- Journal :
- Japanese Journal of Applied Physics
- Publication Type :
- Periodical
- Accession number :
- ejs67840538
- Full Text :
- https://doi.org/10.35848/1347-4065/ad879f