Aluminium surface work hardening enables multi-scale 3D lithography

Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano–micro–macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 107orders of magnitude were precisely fabricated, including carbon, semiconductors and metals. We integrated pressure sensors and biosensors with superior and customizable performances by tailoring the multi-scale carbon networks on different length scales from nanofibres and micropyramids to macrodome arrays. This work provides a versatile technique for prototyping on-demand multi-scale structures and materials to explore desirable mechanical and physical properties.