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Study on magnetorheological polishing processing characteristics of different crystal planes of SiC
- Source :
- Proceedings of SPIE; November 2024, Vol. 13280 Issue: 1 p132800F-132800F-8, 1195209p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 13280
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs67995960
- Full Text :
- https://doi.org/10.1117/12.3046337