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Lateral continuity of ultrathin tungsten layers

Authors :
Radić, Nikola
Dubček, Pavo
Salamon, Krešimir
Dražić, Goran
Jerčinović, Marko
Bernstorff, Sigrid
Mozetič, Miran
Vesel, Alenka
Publication Year :
2011

Abstract

Lateral continuity of ultrathin tungsten layers

Subjects

Subjects :
tungsten
thin films
continuity
reflectivity

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.57a035e5b1ae..b0237865e48bf45ce3760ecdeecac53f

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Authors Abstract Subjects Details