Core-Shell Percolative Nanodielectric for High Voltage Integrated Capacitors

International audience; High-k dielectric nanocomposites are promising materials to miniaturize integrated capacitors. In this work, we investigate core-shell Metal Polymer Composites (MPC) having nanoparticles (carbon-coated nickel, Ni@C) dispersed in a polymer matrix (Polystyrene). A three-step formulation (desagglomeration, surface functionalization and dispersion in a polymeric matrix) was used with simple sonochemical methods. The original core-shell structure of the MPC results of the grafting of a thin second polymer layer on the carbon coating. Finally, films of MPC were deposited on silicon wafers by spincoating and Metal-Insulator-Metal (MIM) capacitors were fabricated. The dielectric response was investigated by using broadband dielectric spectroscopy.Preliminary results show that below the percolation threshold, MPC with a core-shell structure exhibits twice the dielectric constant of the polymer with similar losses that is encouraging for the future (higher dielectric constant, similar loss).