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Development of low resistance Al/Ti stacked metal contacts to p-type 4H-SiC
- Authors :
- Jennings, M. R.
Pérez-Tomás, A.
David Walker
Zhu, L.
Losee, P.
Huang, W.
Balachandran, S.
Guy, O. J.
Covington, J. A.
Chow, T. P.
Mawby, P. A.
- Source :
- Scopus-Elsevier
Details
- Database :
- OpenAIRE
- Journal :
- Scopus-Elsevier
- Accession number :
- edsair.dedup.wf.001..0c7c8cd6050859d4aa5ceeac3c8cdd1b