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Drop-coating Silanization of Silicon Substrates as a Step towards the Fabrication of CMOS-based MEMS Biosensors

Authors :
Pilolli, R
Ucciferri, N
Russino, V
Cioffi, N
Ditaranto, N
Domenici, C
Nannini, Andrea
Pieri, Francesco
Tedeschi, Lorena
Publication Year :
2012

Details

Language :
English
Database :
OpenAIRE
Accession number :
edsair.dedup.wf.001..140c8171d2a541b1dd9f3de07443e73d

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