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Vapour-liquid-solid induced localised growth of heavily Al doped 4H-SiC on patterned substrate

Authors :
Jacquier, C.
Ferro, G.
Godignon, P.
Josep Maria MONTSERRAT
Dezellus, O.
Monteil, Y.
Source :
Scopus-Elsevier

Details

Database :
OpenAIRE
Journal :
Scopus-Elsevier
Accession number :
edsair.dedup.wf.001..1427e8444cddb14bb3b91776f2f18234

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