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Crystal quality evaluation of 6H-SiC layers grown by liquid phase epitaxy around micropipes using micro-Raman scattering spectroscopy

Authors :
Ujihara, T.
Munetoh, S.
Kusunoki, K.
Kamei, K.
Usami, N.
Fujiwara, K.
Gen Sazaki
Nakajima, K.
Madar, R.
Camassel, J.
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Database :
OpenAIRE
Journal :
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Accession number :
edsair.dedup.wf.001..18f9f896c1ca4ac8bec8d89eafcf0aa0

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