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Electrical characterisation of heavily al doped 4H-SiC layer grown by vapour-liquid-solid epitaxy in Al-Si melt
Details
- Database :
- OpenAIRE
- Journal :
- Scopus-Elsevier
- Accession number :
- edsair.dedup.wf.001..192549c1cec8f984388d849826d01be8