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Generation of photonic crystal patterns by single-spot electron beam lithography

Authors :
Kim, S.
Harold Chong
La Rue, R. M.
Marsh, J. H.
Bryce, A. C.
Source :
Scopus-Elsevier

Details

Database :
OpenAIRE
Journal :
Scopus-Elsevier
Accession number :
edsair.dedup.wf.001..36cc8106f4a0f789314523b438b2d82f

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