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Structural Characterisation of ALD coated Porous Si via Beam-Exit Cross-Sectional Polishing

Authors :
Alexander James Robson
Jean Spiece
Charalambos Evangeli
Riina Ritasalo
Mikko Matvejeff
Kestutis Grigoras
Mika Prunnila
Oleg Kolosov
Source :
Lancaster University-Pure

Details

Database :
OpenAIRE
Journal :
Lancaster University-Pure
Accession number :
edsair.dedup.wf.001..378ee6b306953fc74a8cd4ecd7b218c0

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