Technological bricks development for the vertical integration of a Modulator onto a VCSEL for high-speed communications

National audience; The vertical integration of a Modulator onto a mesa-structure VCSEL would allows to go beyond the physical limit of the carrier dynamics for direct modulation. However, this double mesa structure monolithically integrated requires three electrodes and a high frequency injection design optimization. This paper relates the different technological improvements to achieve the static and high frequency operation of such a device.