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Proton beam applications for silicon bulk micromachining
- Authors :
- Nenzi, P.
Bazzano, G.
Marracino, F.
Picardi, L.
Ronsivalle, C.
Surrenti, V.
Vadrucci, M.
Frascati, C. R.
Snels, C.
Mario TUCCI
Ambrosini, F.
Balucani, M.
Klysko, A.
- Source :
- Scopus-Elsevier
Details
- Database :
- OpenAIRE
- Journal :
- Scopus-Elsevier
- Accession number :
- edsair.dedup.wf.001..3d6ca72c120b8bf1126f279c3ea06b98