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Deformation and viscouse flow in nano-imprinting

Authors :
Chukalina, M. V.
Matveev, V. N.
Vadim Sirotkin
Svintsov, A. A.
Zaitsev, S. I.
Source :
Scopus-Elsevier

Details

Database :
OpenAIRE
Journal :
Scopus-Elsevier
Accession number :
edsair.dedup.wf.001..66c140759b7fc8dc177b6ed43fca9359

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