Planar Langmuir probe in pulsing regime

Authors :: Samara, V.
Booth, Jean-Paul
De Marneffe, J.-F.
Boullart, W.
Laboratoire de Physique des Plasmas (LPP)
Université Paris-Saclay-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-École polytechnique (X)-Observatoire de Paris
Université Paris sciences et lettres (PSL)-Université Paris sciences et lettres (PSL)
Source :: PESM (Plasma Etch and Strip for Microelectronics), PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium
Publication Year :: 2011
Publisher :: HAL CCSD, 2011.
Abstract: International audience

Subjects :: [PHYS.PHYS.PHYS-PLASM-PH]Physics [physics]/Physics [physics]/Plasma Physics [physics.plasm-ph]
ComputingMilieux_MISCELLANEOUS

Language :: English
Database :: OpenAIRE
Journal :: PESM (Plasma Etch and Strip for Microelectronics), PESM (Plasma Etch and Strip for Microelectronics), May 2011, Mechelen, Belgium
Accession number :: edsair.dedup.wf.001..689a25d0cda03debd4e3b86a6c44b50e

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