Cavity ring down absorption spectroscopy : a versatile diagnostic for studies of plasma and surface chemistry processes in deposition plasmas

Authors :: Richard van de Sanden
Benedikt, J.
Boogaarts, M. G. H.
Richard Engeln
Johan Hoefnagels
Kessels, W. M. M.
Letourneur, K. G. Y.
Schram, D. C.
Smets, A. H. M.
Plasma & Materials Processing
Plasma-based gas conversion
Source :: Pure TUe, CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes-Juan-les-Pins, France, 43-48, STARTPAGE=43;ENDPAGE=48;TITLE=CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes-Juan-les-Pins, France

Database :: OpenAIRE
Journal :: Pure TUe, CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes-Juan-les-Pins, France, 43-48, STARTPAGE=43;ENDPAGE=48;TITLE=CIP'2001 proceedings : 13th International colloquium on plasma processes, June 10-14, 2001, Antibes-Juan-les-Pins, France
Accession number :: edsair.dedup.wf.001..9009219c1d21a2122c9bf66d2c81ff08

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