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Fabrication of 3D inverse woodpile photonic crystals in silicon

Authors :
Goodwin, Melissa Jane
Harteveld, Cornelis A.M.
Vreman, Timon
Vos, Willem L.
MESA+ Institute
Complex Photonic Systems
Source :
CHAINS 2020
Publication Year :
2022

Details

Language :
English
Database :
OpenAIRE
Journal :
CHAINS 2020
Accession number :
edsair.dedup.wf.001..99ae7e98176b91fe30642e5d2a61edae

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