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Terahertz photoacoustic gas sensor
- Source :
- GDR NanoTeraMIR annual days, GDR NanoTeraMIR annual days, Jun 2019, Saint Raphaël, France
- Publication Year :
- 2019
- Publisher :
- HAL CCSD, 2019.
-
Abstract
- International audience; The concept and the design of an integrated THz photoacoustic gas sensor, on a silicon chip is represented. Ultra-low losses of a Si waveguide and high Q optical cavity are measured and validate the optical part of this sensor.
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- GDR NanoTeraMIR annual days, GDR NanoTeraMIR annual days, Jun 2019, Saint Raphaël, France
- Accession number :
- edsair.dedup.wf.001..ba751cbe4962e99694d53f57695ac470