Design and realization of silicon cantilever beams in micro actuator for boundary layer control

International audience; In aeronautic sector, the reattachement of separeted air flows close to aircraft wings can be actively controlled by blowing air jets in the boundary layer, through submillimetric holes situated on airplane wings near the seperation edges. Performance improvement of next generation planes (lift enhancement, drag reduction) pushes plane designers to investigate MEMS solutions in order to provide active air flow control. This paper presents realization of silicon cantilever beams by Deep Reactive Ion Etching (DRIE) in order to reach high aspect ratio. These cantilever beams take place in the design and realization of a micro-valve which will provide high speed pulsated air jets for boundary layer control.