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Analysis of Inter-and Intra-Grain Defects in Electrically Characterized Poly-Si Nanowire TFTs by Multicomponent DF Imaging Based on NBD-2DI

Authors :
K. Sakuma
H. Tanaka
R. Takaishi
M. Saitoh
T. Asano
M. Oda
Source :
Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials.
Publication Year :
2017
Publisher :
The Japan Society of Applied Physics, 2017.

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials
Accession number :
edsair.doi...........00daf71e9b8ad1f0c05766a0a2880211