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Deposition of Diamond-like Carbon Films by Pulsed-Laser Evaporation
- Source :
- Japanese Journal of Applied Physics. 26:L1487
- Publication Year :
- 1987
- Publisher :
- IOP Publishing, 1987.
-
Abstract
- Diamond-like carbon thin films were deposited by pulsed-laser evaporation. A carbon target was irradiated by a Xe-Cl laser with a power density of 3×108 W/cm2. Ions were mixed with vaporized atoms. Deposition rates were typically 200 Å/ min. Film properties changed with substrate temperature. The films deposited at 50°C were diamond-like, as confirmed by refractive index (2.1 to 2.2), optical transparenty and chemical resistance. Hydrogen-free films were produced. Optical band gap was 1.4 eV and electrical resistivity was 108 Ω-cm. No crystallinity was observed.
- Subjects :
- Materials science
Diamond-like carbon
business.industry
Band gap
General Engineering
Analytical chemistry
General Physics and Astronomy
chemistry.chemical_element
Substrate (electronics)
Evaporation (deposition)
eye diseases
Crystallinity
Carbon film
Optics
chemistry
sense organs
Thin film
business
Carbon
Subjects
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 26
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........00e1f2be6f84b79045a9f8e5fd80fbe7