Characteristic of pad cut rate as conditioner structure

MLA

Sunjae Jang, et al. “Characteristic of Pad Cut Rate as Conditioner Structure.” Proceedings of International Conference on Planarization/CMP Technology 2014, Nov. 2014. EBSCOhost, https://doi.org/10.1109/icpt.2014.7017308.

APA

Sunjae Jang, Taesung Kim, Cheolmin Shin, Hongyi Qin, & Jichul Yang. (2014). Characteristic of pad cut rate as conditioner structure. Proceedings of International Conference on Planarization/CMP Technology 2014. https://doi.org/10.1109/icpt.2014.7017308

Chicago

Sunjae Jang, Taesung Kim, Cheolmin Shin, Hongyi Qin, and Jichul Yang. 2014. “Characteristic of Pad Cut Rate as Conditioner Structure.” Proceedings of International Conference on Planarization/CMP Technology 2014, November. doi:10.1109/icpt.2014.7017308.