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Ab Initio Simulations of Low-K and Ultra Low-K Dielectric Interconnects
- Publication Year :
- 2007
- Publisher :
- Trans Tech Publications Ltd., 2007.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........01babd4e008f832d75be1095d1f239e7
- Full Text :
- https://doi.org/10.4028/3-908451-30-2.1061