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Multi-purpose 300mm silicon photonics platform for R&D and product prototyping
- Source :
- Integrated Optics: Devices, Materials, and Technologies XXVI.
- Publication Year :
- 2022
- Publisher :
- SPIE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- Integrated Optics: Devices, Materials, and Technologies XXVI
- Accession number :
- edsair.doi...........023aaeefb51892504cd6e4d47147ea69
- Full Text :
- https://doi.org/10.1117/12.2616166