Tubular micro- and nano- sensors and actuators for aerodynamics

Authors :: Vladimir Seleznev
Alexander N. Shiplyuk
Vladimir A. Aniskin
Victor Ya. Prinz
Source :: 2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies.
Publication Year :: 2009
Publisher :: IEEE, 2009.
Abstract: New data on the fabrication and study of semiconductor micro- and nanotubes, and also on the application of such micro- and nanotubes as basic elements in sensors and actuators are reported. Fabrication methods for tubular micro- and nanosensors and actuators are described, and examples of fabricated devices are presented. The potential offered by the fabricated pilot devices in aerodynamic applications is demonstrated.

Subjects :: Nanotube
Materials science
Fabrication
Microfluidics
Physics::Optics
Nanotechnology
Nanofluidics
Aerodynamics
Condensed Matter::Mesoscopic Systems and Quantum Hall Effect
Computer Science::Other
Condensed Matter::Materials Science
Nanosensor
Nano
Hardware_INTEGRATEDCIRCUITS
Actuator

Database :: OpenAIRE
Journal :: 2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies
Accession number :: edsair.doi...........03047a265b1a35872cfbc64119f17e91
Full Text :: https://doi.org/10.1109/internano.2009.5335627