Optimization of the FIB Preparation on Polycrystalline Al Materials through the Orientation Determination by EBSD

For the assessment of the precipitation state in aluminum-based alloys by transmission electron microscopy (TEM), the sample must have an orientation in the [100] direction of the matrix. TEMs equipped with objective lenses that are optimized for high resolution are mostly characterized by limited sample tilt angles. The required crystal orientation must thus be taken into account during sampling. A favorably oriented grain was chosen in a coarse-grained material using electron backscatter diffraction and prepared in a suitable direction applying the in-situ lift-out method in the focused ion beam device. After that, the final correction of the orientation in the TEM amounts to less than 12°.