Thickness-dependent stress-relaxation in thin SGOI structures and its improvement

MLA

Masanobu Miyao, et al. “Thickness-Dependent Stress-Relaxation in Thin SGOI Structures and Its Improvement.” Thin Solid Films, vol. 508, June 2006, pp. 247–50. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........051c38f7294ca9ab2ec27fde06cc1040&authtype=sso&custid=ns315887.

APA

Masanobu Miyao, Masaharu Ninomiya, Masanori Tanaka, Masahiko Nakamae, Isao Tsunoda, Taizoh Sadoh, & Toyotsugu Enokida. (2006). Thickness-dependent stress-relaxation in thin SGOI structures and its improvement. Thin Solid Films, 508, 247–250.

Chicago

Masanobu Miyao, Masaharu Ninomiya, Masanori Tanaka, Masahiko Nakamae, Isao Tsunoda, Taizoh Sadoh, and Toyotsugu Enokida. 2006. “Thickness-Dependent Stress-Relaxation in Thin SGOI Structures and Its Improvement.” Thin Solid Films 508 (June): 247–50. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........051c38f7294ca9ab2ec27fde06cc1040&authtype=sso&custid=ns315887.