Annealing Kinetics of the Interstitial Carbon–Dioxygen Complex in Silicon

Authors :: Aleksei A. Grigorev
Edouard Monakhov
Hussein M. Ayedh
Augustinas Galeckas
Bengt Gunnar Svensson
Source :: physica status solidi (a). 216:1800986
Publication Year :: 2019
Publisher :: Wiley, 2019.

Subjects :: Materials science
Deep-level transient spectroscopy
Silicon
Annealing (metallurgy)
Transition metal dioxygen complex
Kinetics
chemistry.chemical_element
Surfaces and Interfaces
Condensed Matter Physics
Photochemistry
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
chemistry
Materials Chemistry
Electrical and Electronic Engineering

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