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Simulation and experimental research on the parameter distribution of low-pressure Ar/O 2 inductivly coupled plasma
- Source :
- Vacuum. 145:77-85
- Publication Year :
- 2017
- Publisher :
- Elsevier BV, 2017.
-
Abstract
- Adding electronegative gas to the inert gas is an important means of adjusting the plasma parameter distribution. In this paper, a fluid model of the Ar/O 2 inductivly coupled plasma (ICP) is used to investigate the parameter distribution, while the electron energy distribution function (EEDF) and the transport coefficients are obtained by the Boltzmann equation solver module to improve the accuracy. The spatial-temporal evolution of the electron density and the electron temperature of the ICP are obtained and the influence of the discharge power and the oxygen mole ratio on the distribution of the ICP parameters is compared. Additionally, the physical mechanism is researched using the diffusion-transport theory of the plasma. In order to verify the reliability of the model results, an experiment is carried out to diagnose the discharge parameters. The results of the simulation and the experiment are performed for different power and oxygen mole ratios and a good qualitative and numerical agreement is obtained, indicating that the inclusion of the simulation results in a high accuracy.
- Subjects :
- Electron density
Analytical chemistry
chemistry.chemical_element
Plasma
Condensed Matter Physics
01 natural sciences
Oxygen
Boltzmann equation
010305 fluids & plasmas
Surfaces, Coatings and Films
Computational physics
Power (physics)
chemistry
Physics::Plasma Physics
0103 physical sciences
Plasma parameter
Electron temperature
010306 general physics
Inert gas
Instrumentation
Subjects
Details
- ISSN :
- 0042207X
- Volume :
- 145
- Database :
- OpenAIRE
- Journal :
- Vacuum
- Accession number :
- edsair.doi...........05a5288c69597c2627242170289f132d