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Synthesis of nanodot arrays using self-assembled niobium oxide nanopillar mask by reactive ion etching

Authors :
Ik Hyun Park
Jang Woo Lee
Chee Won Chung
Publication Year :
2006
Publisher :
Elsevier, 2006.

Subjects

Subjects :
Materials science
Mordançage
Etching (microfabrication)
Inorganic chemistry
Niobium oxide
Nanotechnology
Self-assembly
Nanodot
Reactive-ion etching
Ion
Nanopillar

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........05c455b5ecb1062175cb499187a548cb

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