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Preparation of Stoichiometric KTa1-xNbxO3 Films by RF Sputtering

Authors :
Hidetoshi Tsuchiya
Tatsuo Fukami
Source :
IEEJ Transactions on Fundamentals and Materials. 97:322-328
Publication Year :
1977
Publisher :
Institute of Electrical Engineers of Japan (IEE Japan), 1977.

Subjects

Subjects :
Electrical and Electronic Engineering

Details

ISSN :
13475533 and 03854205
Volume :
97
Database :
OpenAIRE
Journal :
IEEJ Transactions on Fundamentals and Materials
Accession number :
edsair.doi...........05e057b260ee5073844ba9cf6725d86e

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