The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition

Authors :: Moritz Oberberg
Birk Berger
Dennis Engel
Jan Lunze
Julian Schulze
Ralf Peter Brinkmann
Peter Awakowicz
Christian Woelfel
Source :: Journal of Instrumentation. 14:P10007-P10007
Publication Year :: 2019
Publisher :: IOP Publishing, 2019.

Subjects :: Materials science
Argon
business.industry
Resonance
chemistry.chemical_element
Plasma
Electron
chemistry
Control theory
Optoelectronics
Deposition (phase transition)
business
Multipole expansion
Instrumentation
Mathematical Physics

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