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A process for low cost wire grid polarizers
- Source :
- Alternative Lithographic Technologies V.
- Publication Year :
- 2013
- Publisher :
- SPIE, 2013.
-
Abstract
- Oblique angle metal deposition has been combined with high aspect ratio imprinted structures to create wire grid polarizers (WGP’s) for use as polarization recyclers in liquid crystal displays. The process of oblique deposition was simulated to determine optimal feature profile and deposition geometry. The optical results for the oblique deposition WGP show contrast comparable to a conventionally etched WGP. The next steps to the fabrication of meter sized WGP are proposed.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- Alternative Lithographic Technologies V
- Accession number :
- edsair.doi...........067edf73b21899c43245d359eed689a9