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A process for low cost wire grid polarizers

Authors :
Erik W. Egan
A. Hochbaum
M. P. C. Watts
Stephan Stephansen
Chad Johns
M. Little
Source :
Alternative Lithographic Technologies V.
Publication Year :
2013
Publisher :
SPIE, 2013.

Abstract

Oblique angle metal deposition has been combined with high aspect ratio imprinted structures to create wire grid polarizers (WGP’s) for use as polarization recyclers in liquid crystal displays. The process of oblique deposition was simulated to determine optimal feature profile and deposition geometry. The optical results for the oblique deposition WGP show contrast comparable to a conventionally etched WGP. The next steps to the fabrication of meter sized WGP are proposed.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
Alternative Lithographic Technologies V
Accession number :
edsair.doi...........067edf73b21899c43245d359eed689a9