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Structure and Properties of TiAlLaN Coatings Deposited at Various Ar/N2 Flow Ratio Using a Mid-Frequency Magnetron Sputtering System
- Source :
- Advanced Materials Research. :629-633
- Publication Year :
- 2013
- Publisher :
- Trans Tech Publications, Ltd., 2013.
-
Abstract
- TiAlLaN coatings were deposited on the cemented carbide substrates by mid-frequency magnetron sputtering system. The effects of Ar/N2 flow ratio on the composition, structure, adhesion and hardness followed with elastic modulus and H/E ratio were investigated systematically. Results indicate that all the Ti/Al ratios of the coatings were higher than that of the Ti/Al ratio in the target; however, the Ti/Al ratio increased with the Ar/N2 flow ratio changed. XRD patterns show that the intensity of (111) peak was elevated with the Ar/N2 flow ratio increased. Meanwhile, the peak shifted to lower angles, which implied increases of the lattice parameter. The TiAlLaN coating under the Ar/N2 flow ratio of 3:1 showed the best adhesion, the highest hardness and the lowest H/E ratio which indicated perfect wear resistance.
Details
- ISSN :
- 16628985
- Database :
- OpenAIRE
- Journal :
- Advanced Materials Research
- Accession number :
- edsair.doi...........07069fb2b0f457180ef17fadf8fefc3d