Development of an Electro-Adhesive Surface Applying 3-Dimensional Micro Structures

Authors :: Tojiro Aoyama
Soichiro Yamada
Yasuhiro Kakinuma
Source :: Journal of the Japan Society for Precision Engineering. 81:264-269
Publication Year :: 2015
Publisher :: Japan Society for Precision Engineering, 2015.

Subjects :: Microelectromechanical systems
Surface (mathematics)
Materials science
law
Mechanical Engineering
Nanotechnology
Development (differential geometry)
Adhesive
Photolithography
Micro structure
law.invention

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