Inline detection of Chrome degradation on binary 193nm photomasks

MLA

Charles Crawford, et al. “Inline Detection of Chrome Degradation on Binary 193nm Photomasks.” SPIE Proceedings, Sept. 2013. EBSCOhost, https://doi.org/10.1117/12.2029470.

APA

Charles Crawford, Stuart Gough, Frank Sundermann, Carlo Pogliani, Félix Dufaye, Hiroyuki Miyashita, Astrid Sippel, Christophe Brochard, Edgardo García-Berríos, Mark Wylie, Luca Sartelli, & Carl Hess. (2013). Inline detection of Chrome degradation on binary 193nm photomasks. SPIE Proceedings. https://doi.org/10.1117/12.2029470

Chicago

Charles Crawford, Stuart Gough, Frank Sundermann, Carlo Pogliani, Félix Dufaye, Hiroyuki Miyashita, Astrid Sippel, et al. 2013. “Inline Detection of Chrome Degradation on Binary 193nm Photomasks.” SPIE Proceedings, September. doi:10.1117/12.2029470.