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Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors
- Source :
- IEEE Sensors Journal. 17:8324-8331
- Publication Year :
- 2017
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2017.
-
Abstract
- In this paper, the effect of insulation trenches on micromachined silicon thermal wind sensors is explored. The sensor is composed of a central heater and four thermistors. It measures wind speed and direction through detecting the airflow-induced temperature difference on the chip surface. Three different forms of insulation trenches are designed and fabricated to explore their effects on the performance of wind sensors. The experimental results show that when the sensors work in constant voltage mode, the center and arch trenches enhance the performance, while the arch trenches have the most significant effect on the sensitivity improvement. Moreover, all the three kinds of insulation trenches reduce the power consumption for the sensors operated in constant temperature difference mode. The insulation trench design in this paper can provide a valuable reference for the design and fabrication of micromachined silicon thermal wind sensors.
- Subjects :
- Fabrication
Materials science
Silicon
business.industry
010401 analytical chemistry
Thermistor
Electrical engineering
chemistry.chemical_element
Mechanical engineering
02 engineering and technology
Thermal wind
021001 nanoscience & nanotechnology
Chip
01 natural sciences
Temperature measurement
Wind speed
0104 chemical sciences
chemistry
Trench
Electrical and Electronic Engineering
0210 nano-technology
business
Instrumentation
Subjects
Details
- ISSN :
- 23799153 and 1530437X
- Volume :
- 17
- Database :
- OpenAIRE
- Journal :
- IEEE Sensors Journal
- Accession number :
- edsair.doi...........092893fa824661bf3cfe57c2d830e443