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Vibration Mode Tuning of Acoustic Pillar Array Chip for Precise Microscale Manipulations
- Source :
- 2022 IEEE International Ultrasonics Symposium (IUS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 IEEE International Ultrasonics Symposium (IUS)
- Accession number :
- edsair.doi...........096fe561c6a5ad86281e4d27ee48d658