In-situ fabrication of {111} mirror and optical bench using double-sided anisotropic wet etching of {100} silicon wafer

MLA

Hyunseok Kim, et al. “In-Situ Fabrication of {111} Mirror and Optical Bench Using Double-Sided Anisotropic Wet Etching of {100} Silicon Wafer.” 2012 International Conference on Optical MEMS and Nanophotonics, Aug. 2012. EBSCOhost, https://doi.org/10.1109/omems.2012.6318834.

APA

Hyunseok Kim, Kook-Nyung Lee, Jung-Mu Kim, Sunghyun Yoo, & Yong-Kweon Kim. (2012). In-situ fabrication of {111} mirror and optical bench using double-sided anisotropic wet etching of {100} silicon wafer. 2012 International Conference on Optical MEMS and Nanophotonics. https://doi.org/10.1109/omems.2012.6318834

Chicago

Hyunseok Kim, Kook-Nyung Lee, Jung-Mu Kim, Sunghyun Yoo, and Yong-Kweon Kim. 2012. “In-Situ Fabrication of {111} Mirror and Optical Bench Using Double-Sided Anisotropic Wet Etching of {100} Silicon Wafer.” 2012 International Conference on Optical MEMS and Nanophotonics, August. doi:10.1109/omems.2012.6318834.