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Effect of Nitrogen Plasma Treatment on Titanium Suboxide Thin Films

Authors :
Ji-Won Jang
Hye-Won Seo
Hyeok Jee
Source :
New Physics: Sae Mulli. 69:1303-1307
Publication Year :
2019
Publisher :
Korean Physical Society, 2019.

Subjects

Subjects :
Suboxide
symbols.namesake
Materials science
chemistry
Nitrogen plasma
Inorganic chemistry
symbols
General Physics and Astronomy
chemistry.chemical_element
Plasma treatment
Thin film
Raman spectroscopy
Titanium

Details

ISSN :
22890041 and 03744914
Volume :
69
Database :
OpenAIRE
Journal :
New Physics: Sae Mulli
Accession number :
edsair.doi...........0cb89e87dc2e8ac0296bcd9eafae303c

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